Semiconductor Etching Equipment Yttrium Oxide Ceramics Rare Earth Oxide
Ceramic materials have good corrosion resistance, therefore, in the semiconductor industry, various ceramic materials have become plasma etching resistant materials for wafer processing equipment. Among them, yttrium oxide (Y2O3) belongs to the cubic crystal system, with a melting point of 2430 ℃, good electrical insulation, and good transparency. Many studies have shown that the plasma etching resistance of Y2O3 ceramic coatings is superior to that of Al2O3 coatings.
【Application】
1. It is suitable for ceramics manufacturing.
2. It is resistant to many reactive molten metals such as titanium or uranium.
3. For producing of multilayer ceramic capacitors, Yttrium oxide is also employed as a dopant to reduce the Curie temperature of the barium titanate substrate due to its special properties.
【Specification】
1. Chemical properties: TREO>99%,Y2O3/TREO>99.99%
2. Color: white
| ITEM | INDEX | ITEM | INDEX |
| TREO% | 99 | D50 | 1-2um |
| CeO2/ITREO% | <0.001 | D90 | <8um |
| La2O3/TREO% | 99.99 | D99 | <12um |
| Pr6O11/TREO% | <0.001 | BET | 4-10m2/g |
【Product features】
1.small partical size:D50=1~2um
【Packing】 25kgs/poly-drum ,500kgs/pallet
1 Q: What's the guarantee ?
A:1). Our guarantee for 12 months.
2). 18 hours' technical support by email, video or calling
3). English manual and video tutorial
4). 24 hours on line service each day, free professional technical support.
2 Q: How can you get sample?
A: Free samples are available, but on the basis that you pay the courier charges.
3 Q: Do you provide equipment operation training?
A:Yes. We can will send one or two professional technicians (one is electrical engineer, one is mechanical engineer) to install and adjust the machines and help train the workers.
4 Q: What are your terms of payment?
A: Payment<=1000USD, 100% in advance. Payment>=1000USD, 30% T/T in advance, balance before shipment.
If you have other questions, please feel free to contact us.
Our company is always paying great attention to the intellectual property and independent development, and pursuing innovation of science and technology. Our company has been recognized as “High-Tech Enterprise of Shanghai” since 2008. The project of the high-precision rare earth polishing powder passed high-tech achievements transformation, and its annual production reaches 2000 tons.
We will always adhere to the philosophy of “quality first” business, and improve the quality of our product and service actively.
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Semiconductor Etching Equipment Yttrium Oxide Ceramics Rare Earth Oxide Images
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